au.\*:("WILDFEUER, R")
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Modular process modeling for OPCKECK, M. C; BODENDORF, C; SCHMIDTLING, T et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 652044.1-652044.9, issn 0277-786X, isbn 978-0-8194-6639-6Conference Paper
